Facility
Microelectromechanical Systems
Overview
Microelectromechanical systems or MEMS is the technology of very small devices such as sensors and microelectronics. Specialist facilities within controlled environments are essential to create these devices.
MEMS can be produced from silicon, polymers, metals and ceramics and the universities have the equipment that can process these by deposition, patterning, etching, lithography and die preparation.
The pieces of equipment which produce these delicate components are housed within controlled environments which are clean of contamination. See further details on our clean labs for more information.